Quality Assessment of Processed Graphene Chips for Biosensor Application

The quality of graphene intended for use in biosensors was assessed on manufactured chips using a set methods including atomic force microscopy (AFM), Raman spectroscopy, and low-frequency noise investigation. It is shown that local areas residues the surface, formed as result interaction with photoresist at initial stage chip development, led to spread resistance (R) range 1–10 kOhm an increase root mean square (RMS) roughness up 10 times, which can significantly worsen reproducibility parameters biosensor applications. observed control after photolithography (PLG) AFM subsequent additional cleaning reduced R values 1–1.6 obtained RMS similar film before PLG. Monitoring spectral density voltage fluctuation (SU), provides integral information about system defects material, makes it possible identify low inhomogeneously distributed compressive stresses by type frequency dependence SU(f).